Manitou Systems offers these RF plasma power products including RF power generators, impedance matching networks and, and accessories.
(Click the link below to select your product category)
40KHz
- Model BDS-MF 5, 10 or, 15 kW mid frequency plasma generators – with graphical LCD front control panel
13.56MHz
- Model PB3 integrated system – 100 & 300 watt RF generator + internal manual impedance matching network
- Model BDS-HF Blackbox 200, 300 or, 750 watt RF generators – for OEM system integration
- Model BDS-HF AFP 200, 300 or, 750 watt RF generators – with graphical LCD front control panel
- Model MTK manually adjusted impedance matching network
- Model AMN 750 automatic impedance matching network – complements the Model BDS-HF generator products
- Model VIMM impedance matching network – inductively tuned topology
Accessories
- Impedance Matching Networks – Automatic & manually operated
- MatrixxTM RF/DC switch modules
- Parallel cable module – for dual cable feed on sputtering sources
- PowerlineTM coaxial cables – standard and ultra-hi power power capability
- EliminatorTM RF filters – for RF blocking applications