Manitou Systems offer various packages to complement individual technical needs and budgets. The RF power delivery package includes an RF power generator, impedance matching network, control / RF cables and, cathode switching. The DC power package typically includes the DC power supply, connection cable, RF blocking filter and cathode switch. Our Matrixx switching modules enable easy switching between multiple plasma power generators and sputtering sources.

 

Typical RF Power delivery package

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Typical RF Power delivery package with a Matrixx Switch Module 

  

 

Typical DC Power delivery package

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• Matrixx^TM RF/DC switch modules
• Parallel cable module  –  for dual cable feed on sputtering sources
• Powerline^TM coaxial cables  –  standard and ultra-hi power power capability
• Eliminator^TM RF filters  –  for RF blocking applications