Bdiscom is proud to introduce a new generation of low to medium power high frequency (HF) power generators designed to complement laboratory scale thin film R&D and industrial plasma systems.
Front View 
Rear View
The BDS-HF-AFP Series of RF Generators includes an active front control/display panel and available in output power levels of 200, 300 and, 750 watts @13.56MHz. The active front panel provides touch control and display of both the generator’s functions as well as an automatic impedance matching network module. It’s half rack size enables easy mounting in most plasma system applications.
The images above show the Model BDS-HF-AFP RF generator and the Model AMN-750 Automatic Matching Network. The optional control and RF cable set are also shown. The image to the right includes the Matrixx multi cathode switch module connected to the ANM-750.
The BDS-HF has the following features:
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- Compact size – the 1/2 rack enclosure measures 3RU (5.25″/132.5mm) tall.
- LCD touch display – the large format blue on white contains all operating parameters.
- Flexible control interface – RS232 and analog user ports are included – Profibus control is available as an option.
- Efficient power conversion – A switch mode AC>DC converter and a class E RF power circuit enables 85>90% overall efficiency and low cabinet heat load.
- Common exciter I/O
- Compliance – CE MARK
- Country of manufacture – ITALY
Product Specifications |
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| BDS-HF 200 | BDS-HF 300 | BDS-HF 750 | |
| AC mains input voltage | 90>240VAC 1-phase 50/60Hz with Power Factor Correction | 90>240VAC 1-phase 50/60Hz with Power Factor Correction | 90>240VAC 1-phase 50/60Hz with Power Factor Correction |
| AC Mains input power | 400 watts | ||
| Grounding | via PE (protective earth) | via PE (protective earth) | via PE (protective earth) |
| Enclosure | 3RU 5.25″/132.5mm tall X 9.5″/241mm wide X 15-3/4″/400mm deep | 3RU 5.25″/132.5mm tall X 9.5″/241mm wide X 15-3/4″/400mm deep | 3RU 5.25″/132.5mm tall X 9.5″/241mm wide X 15-3/4″/400mm deep |
| Product weight | 15.43lbs/7kg | 15.43lbs/7kg | 15.43lbs/7kg |
| Shipping weight | 17.64 lbs/8 kg | 17.64 lbs/8 kg | 17.64 lbs/8 kg |
| RF output power (into 50 ohms) | 200 watts maximum | 300 watts maximum | 750 watts maximum |
| RF output frequency | 13.56MHz crystal controlled | 13.56MHz crystal controlled | 13.56MHz crystal controlled |
| RF output power control | 4>300 watts variable | ||
| DC bias control | |||
| RF output harmonics | -40db below fundamental frequency | -40db below fundamental frequency | -40db below fundamental frequency |
| RF power detector | Forward & reflected measurement with a 3% accuracy | Forward & reflected measurement with a 3% accuracy | Forward & reflected measurement with a 3% accuracy |
| RF output connection | Type N female | Type N female | Type N female |
| User interface | Monochrome blue on white touch display + rotary encoder | Monochrome blue on white touch display + rotary encoder | Monochrome blue on white touch display + rotary encoder |
| Cooling | Forced air – through front panel with variable speed fans | Forced air – through front panel with variable speed fans | Forced air – through front panel with variable speed fans |
| Safety Interlock | via a DB9 female connector located on the rear panel | via a DB9 female connector located on the rear panel | via a DB9 female connector located on the rear panel |
| Control interface | Analog: 0>10VDC signals & Digital: RS232 (optional) Profibus | Analog: 0>10VDC signals & Digital: RS232 (optional) Profibus | Analog: 0>10VDC signals & Digital: RS232 (optional) Profibus |
| Operating (ambient) temperature | 5>45 degrees C – no condensation or icing | 5>45 degrees C – no condensation or icing | 5>45 degrees C – no condensation or icing |
| RF circuit protection | Reflected RF power, power amplifier (PA) over-voltage & over-current and over-temperature | Reflected RF power, power amplifier (PA) over-voltage & over-current and over-temperature | Reflected RF power, power amplifier (PA) over-voltage & over-current and over-temperature |
| Power conversion efficiency | Typically 85>90% | Typically 85>90% | Typically 85>90% |
| Compliance | CE EMC EN55011 Group 2, Class A ISM | CE EMC EN55011 Group 2, Class A ISM | CE EMC EN55011 Group 2, Class A ISM |
| Matching network interface | Direct connection to an AMN-750 automatic matching network via a DB15 female connector. Optional dual matching control. | Direct connection to an AMN-750 automatic matching network via a DB15 female connector. Optional dual matching control. | Direct connection to an AMN-750 automatic matching network via a DB15 female connector. Optional dual matching control. |
CEX Common Exciter Input = 0.25>1.5Vrms Output = 1Vrms Type SMA female connectors
Shipping
The Model BDS-HF (RF generator) and AMN (matching network) products are packaged for shipment in cardboard cartons with Ethafoam inserts. A single carton will contain either a generator or match unit and measures 23-5/8″ X 12″ X 12″ (60cm X 30cm X 30cm).
Downloads
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- BDS-HF-AFP Data Sheet
- Mechanical installation information (.pdf)
- Mechanical installation drawing (.stp) Please Contact Manitou Systems to obtain this file.
- Configuration diagram
- RS-232 control tutorial
Technical Support and FAQs