Process recipe cookbook Roll your own process Starting points – pressure, gas flow & type, power Directing the plasma discharge to effect uniformity at the
Bdiscom Model BDS-HF-300AFP Problem: When turning ON the RF power output, the value starts at the set-point and then falls to 001 watts – it should
Cable type Connector type Flexibility 50 or non-50 ohm operation RF power level 3′ long cable between match output and plasma / sputter source
The FAQs listed below are based on real problems encountered during the commissioning and use of the Model PB3 RF power systems. All data in
This tutorial is designed to enable the user to determine the actual operating impedance of an RF powered plasma process chamber using commonly available test
This tutorial is designed to describe various impedance matching network problems, troubleshooting techniques and solutions. System level and work bench troubleshooting techniques will be discussed. The automatic
Coaxial connector adapters have their place in both test and production systems. This page details the dos and don’ts of their use in plasma systems.
Mounting considerations Manual vs automatic operation Insulating materials for use with RF and microwave power components Search & Pounce vs defined end stop operation Matching
RF Systems 3′ long cable between match output and the sputter/plasma source DC Systems
Manitou Systems Inc. is a global supplier of high power radio frequency (RF) generators, high voltage DC plasma generators , microwave power system products and, plasma processing tools specifically designed for industrial and scientific applications.