Series MTK manual impedance matching networks provides an economical approach for use with small area sputtering sources and RF substrate bias applications. Forced air cooling keeps the variable capacitors and the fixed (tapped) inductor cool. Standard models operate at 13.56MHz while special models are available to operate at VHF frequencies up to 125MHz.
All models will complement any type of (50 ohm output) RF generator.
Standard MTK models include air gap variable capacitors which are designed to operate with RF power levels up to 600 watts at frequencies from 13.56 to 40 MHz. Models that operate at frequencies from 40 > 125MHz are available upon special request. Please contact the factory.
The MTK may be ordered with an optional (internal) DC bias probe that enables active measurement of the developed DC bias potential on a parallel plate electrode or conductive sputtering target. The probe’s DC metering voltage output is designed to drive a user’s high impedance digital volt meter or connect directly to the Model PB3 or BDS-HF generator products.
Model MTK Specifications
- RF power rating: up to 600 watts
- Input impedance: 50 ohms resistive
- Operating frequency: 13 to 40 MHz
- Cooling: forced air
- Input connector: type N female
- Output connector: type 7/16 DIN or HN Female
- Output impedance: wide range (based on internal series inductor tap setting and selection of shunt capacitor value(s)
- AC mains: The unit comes with a remote, wall mount DC power pack rated at 24V DC/400 MA output and 110V AC 50/60 HZ input. The user may also choose to supply their own 24V DC power source.
- DC bias probe output: DB 25 female connector – Calibrated for 0>2VDC output = 0>2000VDC electrode potential input.
Note: VHF (>40MHz) models are designed using matching components with values different than 13.56MHz models. Each model type will only operate within a specific frequency range. The matching components may require optimization by the installer/user to properly match the plasma load. All VHF models are required to be located as close as possible to the plasma electrode ~6″ maximum distance.
- MTK Data sheet
- Mechanical installation drawing