Eliminator filters are used in RF (radio frequency) powered plasma processing systems to provide sub-system protection as well as for functional purposes such as simultaneously combining RF + DC power to a sputtering cathode. Manitou Systems designs and manufacturers off the shelf and application specific models to complement your complex plasma processes.
Eliminator filter products are categorized into various applications that are used in these applications:
Application specific filters may be used to attenuate or block low frequency RF power used to power large area magnetron sputter cathodes that employ electro-magnets (used to sweep or focus the plasma discharge. The filter provides isolation between the electro-magnet and it’s high-current control power supply. Contact Manitou Systems for detailed information on these products.
Click here to go to specific product pages for detailed information: