Instructions for easily measuring the actual complex impedance of your RF powered plasma chamber
This tutorial is designed to enable the user to determine the actual operating impedance of an RF powered plasma process chamber using commonly available test equipment and hardware. The objective is to use the described empirical method to determine the chamber impedance by measuring the output of the impedance matching network (fixed in the tuned […]
Matching Network Troubleshooting Instructions
This tutorial is designed to describe various impedance matching network problems, troubleshooting techniques and solutions. System level and work bench troubleshooting techniques will be discussed. The automatic matching network does not properly tune. Assumptions; this unit and the system its installed into was previously operational, the plasma does ignite, the match can be manually controlled via its […]