This page includes target materials and hardware that complement MAK sputtering sources

Please contact Manitou Systems for a price quotation

Target Materials and Assemblies

1.3″ MAK Sputter Sources

• Copper target material, 1/8″ thick, 99.995% purity with keeper attached   Order PN 00010360
• SiO2 target material, 1/8″ thick with copper backing plate                            Order PN 00010361

2″ MAK Sputter Sources

• Copper target material, 1/8″ thick, 99.995% purity with keeper attached   Order PN 00010049
• SiO2 target material, 1/8″ thick with copper backing plate                            Order PN 00010355

3″ MAK Sputter Sources

• Copper target material, 1/4″ thick, 99.995% purity with keeper attached  Order PN 00010048
• SiO2 target material, 1/4″ thick with copper backing plate                            Order PN 00010356

4″ MAK Sputter Sources

• Copper target material, 1/4″ thick, 99.995% purity with keeper attached  Order PN 00008426
• SiO2 target material, 1/4″ thick with copper backing plate                            Order PN 00010357

6″ MAK Sputter Sources

• Copper target material, 1/4″ thick,  99.995% purity with keeper attached  Order PN 00010359
• SiO2 target material, 1/4″ thick with copper backing plate                            Order PN 00010358

Complementary Components and Replacement Parts

• Thermal contact paste
• Quick coupler adapter feedthroughs  (3/4″ Ultratorr type compression fitting to fit the sputter source stalk)
• Copper backing plates
• Target keepers
• Shutter assemblies
• Rotary motion feedthroughs (for shutters)
• Water cooling lines and fittings
• O-ring seals
• Magnet assemblies – NdBFe
• Ground shields
• Housing screws
• Sputter head block assemblies