Manitou Systems offer various packages to complement individual technical needs and budgets. The RF power delivery package includes an RF power generator, impedance matching network, control / RF cables and, cathode switching. The DC power package typically includes the DC power supply, connection cable, RF blocking filter and cathode switch. Our Matrixx switching modules enable easy switching between multiple plasma power generators and sputtering sources.
Typical RF Power delivery package
Typical RF Power delivery package with a Matrixx Switch Module
Typical DC Power delivery package
- MatrixxTM RF/DC switch modules
- Parallel cable module – for dual cable feed on sputtering sources
- PowerlineTM coaxial cables – standard and ultra-hi power power capability
- EliminatorTM RF filters – for RF blocking applications