Meet the new MATRIXX MINI RF/DC switch module
The new Matrixx Mini is designed to simplify RF and DC power switching in plasma processing systems.
Matrixx Mini modules can be mounted directly at a magnetron cathode (sputtering source) to provide an easy method to switch between and RF and DC power generators. The Mini can also be located at the output of a power generator to enable switching between two loads.
A D-sub connector + high quality shielded cable provides the interface between the Mini and the controller.
Manitou Systems offers both high current and low current models and well as versions configured with most industry standard connectors such as Types N, UHF, HN & 7-16 DIN.
The Mini is compatible with all AC, DC, pulsed DC and RF (radio frequency) applications. Specifically optimized versions are available for use at VHF and UHF frequencies.
Complementary coaxial cables and adapters are available to simplify your installation.
The low power Model VR1 version is shown in images to the left and below.
Order PN 000010220-1 With type N female straight connectors on all ports
Order PN 000010220-2 With type UHF female (SO-239) straight connectors on all ports
Order PN 000010220-3 With type BNC female straight connectors on all ports
The high power Model VR3 version accommodates larger connectors such as type 7/16 DIN. See the images to the right and below.
Order PN 000010221-1 With type N female straight connectors on all ports
Order PN 000010221-2 With type N female straight connectors on the output ports & type N female 90 degree on the input port
Order PN 000010221-3 With type HN female straight connectors on all ports
Order PN 000010221-4 With type 7/16DIN female straight connectors on all ports
Typical small magnetron sputtering source switching applications
The graphics below illustrate a few of the many possible installation configurations when used with small magnetron sputtering sources to switch between two power generators.
As each application and installation may be different, we suggest that a support bracket be fabricated and used to secure the Matrixx Mini to the cathode’s stalk or other fixed surface on the vacuum chamber. The Matrixx Mini is configured at the factory (per order) to properly mate with the connector types used in the application. Additional (optional) coaxial adapters may be required to complete the installation.
In-line Mounting Technique
Side/Parallel Mounting Technique