Cost effective approach to add a plasma capability to an existing vacuum system or vacuum furnace

• Perform exploratory plasma based thin film processes

Ideal for educational demonstrations

Test for optical emissions of gas

Process powders & linear substrates

Create nano-materials

Enhance and modify material surfaces

Assist with H₂0 desorption on vacuum chamber surfaces

Inductively heat materials

Perform gas reactions

Create Ozone

The Model EG-50^TM RF Plasma Source enables the user to add a plasma process capability to most vacuum process systems. The EG-50 component set includes a 300 watt/13.56MHz RF power generator with a manually tuned impedance matching network, the EG-50 RF plasma source and a coaxial connection cable.

The EG-50 plasma source is simply mounted over an existing quartz (or other dielectric) tube. The user simply adds an upstream process gas source with flow control and you are ready to process !

EG-50 Plasma Source Specifications

Physical size 5.5” diameter 6.0” tall

Operating pressure range The EG-50 will ignite a plasma and operate over a wide pressure range from

1 millitorr through 10 Torr.

 

• RF power control Using the complementary Model PB3-300 RF power system the RF power is                                                       continuously variable from 2 > 300 watts.

 

• RF Power System See the Model PB3-300 data sheet for complete specifications.

 

• Maximum RF input power 300 watts

 

• RF input connector Type HN female.

 

• Cooling Convection & radiant cooling when used in an open environment. When the                                                       plasma source is mounted in an enclosed cabinet, it may be necessary to add                                                      forced air cooling. An active house exhaust may be sufficient to provide the

necessary cooling airflow.

 

• Environment Non condensing.

 

• Impedance matching The EG-50 requires a Pi topology impedance matching network optimized for                                                     specific pressure, flow and gas types.

 

• Mounting & Gnd. points           Four 8-32 tapped holes provided on each end plate. Any orientation.

 

• Construction Solid aluminum end plates with a perforated aluminum shield. Silver plated

copper antenna coil.

 

• Max process tube size 50mm outer diameter.

 

• Process gas compatibility Most reactive and non-reactive gasses will form a stable plasma discharge using 13.56MHz RF power. User to ensure vacuum system, process tube & seals are compatible with the gas type used.

 

• Compliance The EG-50 component has not been tested

 

• Safety considerations The EG-50 is designed as a low cost developmental component only and does                                                    not include all features necessary for compliance to typical industrial and                                                                   laboratory safety standards. It there is the user’s responsibility to consult local                                                            health & safety authorities for specific information. We do suggest adding an                                                                active exhaust to vent any ozone that will develop with the use of a quartz

process tube. It is also necessary to wear protective eye glasses to prevent

looking directly at the plasma discharge. A Plexiglas or borosilicate glass shield                                                    will provide protection against UV radiation. The use of a borosilicate process                                                     tube will also attenuate UV radiation.

Order a complete plasma system

 

 

 

• E-Z Glow Plasma Source System PN 00009378

 

Including Model EG-50 RF plasma source and Model PB3-300

13.56MHz 300 watt Integrated RF power system

 

Add one of the optional RF coaxial cables listed below to complete the package.

 

 

Order individual components and options

 

• Model EG-50 RF plasma source PN 00005752

 

• Model PB3-300 13.56MHz 300 watt Integrated RF power system PN 00009379

This model includes a Pi topology impedance matching network

and step start plasma ignition system.

 

 

 

• Coaxial cable 36” long, Type HN-male inline connectors   PN 15-700124-76

 

• Coaxial cable 36” long, Type HN-male inline & 90° connectors PN 00009380

 

• Coaxial cable 48” long, Type HN-male inline connectors   PN 00004549

 

• Coaxial cable 48” long, Type HN-male inline & 90° connectors PN 00009381

 

• Type HN Male > Female 90 degree adapter PN 00-503075-56

(add to one end to enable a swivel for easy installation

 

 

 

• Fixed shunt capacitors to tune specific plasma loads Consult factory

Downloads

• Data sheet
• Mechanical installation drawing
• Owner’s manual