BDS GLOW 3000/6000 AFP Generator
The BDS-Glow AFP is a high voltage DC generator with AFP (Active Front Panel) touch screen designed for glow discharge processes.
Used to power R/D and industrial plasma processes, it exhibits high power conversion efficiency (90%) as well as an extremely stable operation.
Typical applications include plasma cleaning or etching of a substrate prior to a thin film coating.
An optional process gas feedback enables control of up to two mass flow controllers (MFC). Using this option, the selected glow discharge process will be stabilized using a variable gas flow to regulate the generator’s output set-point.
AC Mains input current: 3kW 480V/xA or 400V/xA 6kW 480V/xA or 400V/xA (maximum / phase)
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