The BDS-Glow AFP is a high voltage DC generator with AFP (Active Front Panel) touch screen designed for glow discharge processes.
Used to power R/D and industrial plasma processes, it exhibits high power conversion efficiency (90%) as well as an extremely stable operation.
Typical applications include plasma cleaning or etching of a substrate prior to a thin film coating.
An optional process gas feedback enables control of up to two mass flow controllers (MFC). Using this option, the selected glow discharge process will be stabilized using a variable gas flow to regulate the generator’s output set-point.
AC mains input voltage: 480V or 400V 3-phase 50/60Hz +/-10% (USA or European AC mains voltage specified at time of order)
AC Mains input current: 3kW 480V/xA or 400V/xA 6kW 480V/xA or 400V/xA (maximum / phase)
Grounding: via PE (protective earth terminal)
Enclosure: 19″ wide – 4RU (7″/178mm) high 19.5″/490mm deep
Unit weight: xlbs/xkg
Output polarity: Negative (referenced to ground)
Maximum output power: 3.2 and 6.4 kW models
Maximum output voltage: 4kV DC
Maximum output current:
3.2kW Model 0.8 amps
6.4kW Model 1.6 amps
Output connection: one Fischer type 105 coaxial connector – for use with type RG214/U cable
Output cables: weight per cable assembly is x lbs.
Arc detection: transformer primary over current sensing with a 1uS response time
Cooling: Forced air – through front panel with variable speed fans
Front panel display: Touch screen LCD – 240 x 128 pixel – blue color
Front panel user controls: LCD touch display + rotary encoder
Measured and displayed parameters: DC output voltage / output current
Output regulation mode: Voltage or Current (front panel selected)
Functional protection: Over current – open load – process arcs – AC mains under voltage – over temperature
Digital: (optional) RS232 or Profibus
Analog: via a DB25 connector – 0>10VDC signals, 24VDC digital & interlock
Output current: 10V = xA
Output voltage: 10V = 4000V
Operating (ambient) temperature: 5>40 degrees C
Power conversion efficiency: Typically 90%
Compliance: CE / EMC EN55011 Group 2, Class A ISM
Country of manufacture – ITALY
Shipping weight: 66 lbs. (30kg) The total shipping weight is based on the model and included accessories.
Packaging: Wooden crate measuring 36″ (90cm) X 24″ (60cm) X 36″H (90cm)
Shipping methods: This product may be shipped from the factory (as an individual crate).
BDS-Glow 3000 AFP 3.2kW 400V/3ph AC Mains input Order PN: 00010454
BDS-Glow 3000 AFP 3.2kW 480V/3ph AC Mains input Order PN: 00010455
BDS-Glow 6000 AFP 6.4kW 400V/3ph AC Mains input Order PN: 00010456
BDS-Glow 6000 AFP 6.4kW 480V/3ph AC Mains input Order PN: 00010457
Manitou Systems Inc. is a global supplier of high power radio frequency (RF) generators, high voltage DC plasma generators , microwave power system products and, plasma processing tools specifically designed for industrial and scientific applications.