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RF Substrate Bias Considerations

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RF & DC Substrate Bias Considerations

 

 

 

 

 

This page of the RF Witch Doctor Chronicles provides a look into adding an RF or DC Bias Feature to your new design or existing plasma processing system.

When should DC or RF bias be used ?

What is the typical and maximum RF power level to power a substrate stage bias ? (assuming RF bias function only)

What is the typical and maximum RF power level to power a substrate stage sputter etch (clean) & RF bias ? 

Which RF Power control mode is used during the RF bias process ? 

What are the advantages and disadvantages of manually adjusted matching network tuning ?

What type and length of coaxial cable is used to connect the RF System to the substrate stage ?

Additional details to note when designing your RF Bias System:

Some measurements to make when testing your RF Bias System:

 

Order your system components here.

 

Link to Series PB Integrated RF Bias generator application note