Vari-Q Throttle Valves and Controllers  

 

 

 

 

 

 

 

 

 

MeiVac’s VQ throttle valve is the best downstream pressure control valve available on the market. The unique counter-rotating vane set provides for linear control across the entire operating range of the valve. In the open position the VQ throttle valve vanes offer little restriction in the pumping path during critical pump down operations. The counter rotated vane designs allow VQ flanges to be low profile, further minimizing conductance losses and pump stack heights. If linear control and process repeatability are important, then the MeiVac VQ throttle valve is a must for your thin film process application.

 

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Downloads

• Data sheet
• Mechanical installation 2-D drawing – pdf
• Mechanical installation 3-D drawing – pdf
• Application notes