Super Plasma Matrix Model Plasma Matrix Model
40 Liter Process Chamber 2.64 Liter Process Chamber
A look into the open plasma process chamber
PLASMA MATRIX
Tabletop plasma processing systems available with a 2.5 to 40 liter vacuum chamber and powered by a 13.56MHz RF system
Applications include:
- Plasma activation
- Plasma etching
- Ashing
- Substrate preparation / conditioning
- SEM/TEM sample preparation
- Textile surface treatments
- Cleaning of precision parts
- Ophthalmic wettability treatment
- Plastic surface treatment
- Sterilization of medical devices
- Dental implant cleaning & treatment
Click here for a detail list of applications for the Plasma Matrixx systems
Typical process gasses (compatible with these systems):
- Air
- Argon
- Nitrogen
- Helium
- Oxygen (Note: use of oxygen process gas in concentrations of 20>100% requires use of a “corrosive” compatible vacuum pump.)
- Nitrous oxide (Note: use of oxygen process gas in concentrations of 20>100% requires use of a “corrosive” compatible vacuum pump.)
The Plasma Matrix & Super Plasma Matrix tabletop plasma reactors are designed to provide R&D and industrial plasma cleaning, etching and surface activation processes. This low cost system includes many features for your developmental or pilot production applications.
The easy to use LCD touch screen display is friendly and the controller is optimized to oversee all system functions as well as keeping the plasma process stable and repeatable. The Plasma Matrix vacuum chamber is manufactured from 304 stainless steel for easy cleaning and long life.
We offer three versions of the Plasma Matrix :
- Plasma Matrix V with a 2.5 liter with a 200 watt / 13.56MHz RF generator and a manually controlled impedance matching network and a single gas channel controlled with a needle valve
- Plasma Matrix Plus with a 2.5 liter with a 200 watt / 13.56MHz RF generator and a manually controlled impedance matching network and two gas channels controlled with MFCs (mass flow controllers)
- Super Plasma Matrix with a 40 liter with a 300 watt / 13.56MHz RF generator and an automatically controlled impedance matching network and two gas channels controlled with MFCs (mass flow controllers)
Product Specifications
Model Plasma Matrix V Plasma Matrix Plus Super Plasma Matrix Plus
Process chamber dimensions 0.1 cu ft. (2.64 L) 0.1 cu ft. (2.64 L) 1.41 cu ft. (40 L)
8.7″L x 4.72″W x 3.94″H 8.7″L x 4.72″W X 3.94″H 15″W x 16.7″W x 9.84″H
220mm x 120mm x 100mm 220mm x 120mm 100mm 380mm x 424mm x 250mm
RF power (13.56MHz) 200 watts 200 watts 300 watts
Impedance matching Manually adjusted Manually adjusted Automatic
Process gas channels 1 2 2
Process gas control Needle valve Mass flow controllers Mass flow controllers
25 SCCM 25 SCCM
AC Mains input 100>240VAC 100>240VAC 100>240VAC
50/60 Hz 1 phase 50/60 Hz 1 phase 50/60 Hz 1 phase
Vacuum pump connection KF25 KF25 KF40
Vacuum pump requirement 2.3CFM 2.3CFM 5.9CFM
System dimensions 18″ x 7.5″ x 15.5″ (450mm x 190mm x 395mm) 20.75″ x 22.5 x 21″ (525mm x 570mm 530mm)
Plasma system order P/N 00010373 00010008 00010374
Product weight (system only)
Shipping weight (system only) 45kg 45kg
Options & Accessories
Recommended vacuum pump 2.3CFM 2.3CFM 5.9CFM
Vacuum pump (non-corrosive)
order P/N 00010009 00010009 00010371
Vacuum pump (corrosive)
order P/N Contact the factory
Vacuum pump notes: The typical rotary vane pump is designed for use with a hydrocarbon based fluid which will accommodate plasma process that have an oxygen (O2) gas content of less than 20%. If the oxygen gas percentage is 20% or higher, the corrosive type pump is required. This pump type is designed for use with an inert fluid.
General Specifications
Pressure measurement via Pirani Gauge
Base vacuum better than 37.5 milli Torr (5×10-2 mBar)
User interface – 240 x 128 pixel touch screen
Vacuum chamber made from 304 stainless steel
Compliance – CE
Country of manufacture – ITALY
Packaging – wooden crate and strapped to a shipping skid
What’s Included
Basic Package
Plasma Matrix process system
AC power cord (2 meters long) for use with 115VAC single phase AC mains
Vacuum hose (1 meter long) with KF fittings
KF centering ring and clamp for each end of the hose
Optional vacuum pump
Dual stage (non corrosive) rotary pump – Plasma Matrix V & Plus – pump speed @60Hz 2.3CFM, ultimate pressure 1.5×10-3 Torr
Dual stage (non corrosive) rotary pump – Super Plasma Matrix – pump speed @60Hz 5.9CFM, ultimate pressure 1.5×10-3 Torr
AC power cord (4 feet long) to connect the pump to the system’s outlet
Hydrocarbon type pump oil
Notes:
The pump and fluid may be drop shipped directly from the manufacturer
An outlet mist filter is also recommended for proper operation
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