• 33 Ball Pond Road, Danbury, CT 06811-2828
  • 203-733-2110
Sputtering Target Materials

This page includes target materials and hardware that complement MAK sputtering sources

Please contact Manitou Systems for a price quotation

Target Materials and Assemblies

1.3″ MAK Sputter Sources

  • Copper target material, 1/8″ thick, 99.995% purity with keeper attached   Order PN 00010360
  • SiO2 target material, 1/8″ thick with copper backing plate                            Order PN 00010361

2″ MAK Sputter Sources

  • Copper target material, 1/8″ thick, 99.995% purity with keeper attached   Order PN 00010049
  • SiO2 target material, 1/8″ thick with copper backing plate                            Order PN 00010355

3″ MAK Sputter Sources

  • Copper target material, 1/4″ thick, 99.995% purity with keeper attached  Order PN 00010048
  • SiO2 target material, 1/4″ thick with copper backing plate                            Order PN 00010356

4″ MAK Sputter Sources

  • Copper target material, 1/4″ thick, 99.995% purity with keeper attached  Order PN 00008426
  • SiO2 target material, 1/4″ thick with copper backing plate                            Order PN 00010357

6″ MAK Sputter Sources

  • Copper target material, 1/4″ thick,  99.995% purity with keeper attached  Order PN 00010359
  • SiO2 target material, 1/4″ thick with copper backing plate                            Order PN 00010358

Complementary Components and Replacement Parts

  • Thermal contact paste
  • Quick coupler adapter feedthroughs  (3/4″ Ultratorr type compression fitting to fit the sputter source stalk)
  • Copper backing plates
  • Target keepers
  • Shutter assemblies
  • Rotary motion feedthroughs (for shutters)
  • Water cooling lines and fittings
  • O-ring seals
  • Magnet assemblies – NdBFe
  • Ground shields
  • Housing screws
  • Sputter head block assemblies