MeiVac is a leading manufacturer of planar magnetron sputter cathodes. Noted for its simplicity, ease of use, and resulting high reliability, the MAK sputter source has been designed to present the smallest profile possible and deliver higher deposition rates than any comparable sputter sources. MeiVac thin film sputter deposition products are the right choice for your process with a full range of standard and custom configurations.
1.3″, 2″, 3″, 4″ and, 6″ diameter
RF, DC, pulsed DC and AC compatible
High vacuum and ultra high vacuum UHV types
Dielectric, metallic and, magnetic target material compatible