The FAQs listed below are based on real problems encountered during the commissioning and use of the Model PB3 RF power systems. All data in this file originates from our customer’s experiences and from the Manitou Team. Please feel free to submit your experiences with this product so that this web page can continue to grow as a resource.
Why won’t my PB3 power up?
Why won’t the RF-ON and Interlock LEDs light ?
How long can I make the RF output cable (PB3 matching network output to sputtering source). (Models PB3-M & PB3-MD only)
Why can’t the Reflected power be tuned to zero watts ?
Why won’t the plasma ignite?
When used in substrate bias applications, is the RF Power or DC Bias control mode best ?
Why do I need an external interlock connection?
What are the Common Exciter (Rear mounted BNC connectors) for?
What type of signal can be used with the Common Exciter Input ?
What frequency can be used with the Common Exciter Input ?
Model Comments Common Exciter Sine Wave Input level w/o pad Common Exciter Sine Wave Input level with10dB pad Bandwidth
PB3-100 This model does not use a low pass filter after the RF amplifier. +5 to +8 dBm +20 to +26 dBm 11 to 14 MHz
Please click on these links to download the available application notes.
PB3 RF System – Installation of additional series inductance in the matching network section
PB3 RF System – Installation of additional fixed shunt capacitors
Converting the PB3 Impedance Matching Network from “L” > “PI”
PB3 Plasma Impedance Matching Problems & Solutions
Contacting Manitou Systems for help troubleshooting a problem not listed above
Please have the answers to these questions handy: