Model PB3-M Product Data

The PB3-M model is designed to mount inside or along the side of a tabletop plasma system. It’s compact shoebox design contains a single RF power meter, alternate action and momentary control switches, 10 turn RF power adjustment and, manually adjusted matching network tuning knobs. You only need to add an output coaxial cable to complete your RF system and start sputtering today.

The PB3-100-M model has a 100 watt maximum RF output power rating which makes them desirable for powering 1″ diameter sputtering cathodes. The PB3-300-M model has a 300 watt maximum RF output power rating and better suited for larger cathode applications.

RF Generator Specifications:pb3-m_rf-generator

  • Forced air cooling
  • 30% reflected power tolerance
  • 187>240VAC 50/60Hz AC mains input
  • Enclosure body size: 14.25″ wide x 7″ high x 16″ deepUnit weight: 22 Lbs.
  • RF output power: 100 or 300 watts maximum
  • RF output frequency: 13.56MHz
  • Analog I/O control: contact closures & 0>5VDC signals
  • Common Exciter I/O connections: Type BNC female

Impedance Matching Network Specifications:

  • Type L-C topology using two air variable tuning capacitors and a tapped/fixed inductor
  • Forced air cooling
  • Type HN female “plasma” output connector

Ordering information:

  • Model PB3-100-M       Order PN 00001782
  • Model PB3-300-M       Order PN 04-140031-01


  • MatrixxTM RF/DC switch modules
  • Parallel cable module  –  for dual cable feed on sputtering sources
  • PowerlineTM coaxial cables  –  standard and ultra-hi power power capability
  • EliminatorTM RF filters  –  for RF blocking applications