The BDS-MF Generator is a mid frequency RF power generator designed for powering large area plasma processing systems with balanced or unbalanced electrodes. The BDS-MF is capable of providing continuous, non-pulsed power for plasma deposition, etching, surface treatment and cleaning processes. With an operational frequency of 40KHz, its robust design will complement all types of high & low voltage plasma processes. High Voltage (HV) and Low Voltage (LV)models are available with maximum output power ratings of 5, 10 or, 15 kW (The 15kW model available in 2017).
The power generator’s high voltage output topology consists of either one or two (balanced) outputs with individual output connections to drive the electrode(s). The electrodes may be any size or shape (typically a rod or plate). For use with a 2 output generator, each electrode should be dimensionally the same and present a balanced plasma load (graphic below to the left). To complement a plasma system design where each of the two electrodes are NOT physically the same, we offer an optional series pass capacitor module. This optional module enables both electrodes to be driven together by the generator but operate independently by assuming their own DC voltage levels (center graphic below). A two (balanced) output unit may also be used to drive a single electrode by shorting one of the outputs AND using the external, series capacitor module.
Plasma etching and surface treatment systems may include two or more pairs of flat plate type electrodes that operate at a much low voltage and higher current than long round electrode systems. To complement these interleaved, multi-electrode applications, we offer the BDS-MF-LV version that includes a low voltage / high current output circuit. Contact Manitou Systems to discuss your application.
See the graphics below to determine which electrode type your plasma system uses. The graphic at the left shows a balanced electrode system where both electrodes are alternately powered from the plasma generator’s dual outputs. The graphic at the right shows an electrode system where one side of the electrode array is grounded – requiring a single output plasma generator.
One of the major benefits of this product is its packaging design including a compact and internal high voltage matching transformer. This eliminates the need for a separate and costly external transformer box.
The BDS-MF is easy to integrate into an OEM processing system and has the following features:
We are proud to announce: since 2012 over 350 units have been qualified and delivered to our global OEM customers ! These plasma generators have been integrated into production systems used for plasma polymerization processes for the manufacturing of automotive components.
Our international OEM customers include: Arzuffi – Buhler – Creavac – Jeoun – Kolzer – Nurivac – ON Link – VTD – VTI
BDS-MF High Voltage – Low Current Models
BDS-MF-LV Low Voltage – High Current Models
(1 or 2 based on model) 26.3 foot (8 meter) long type RG214 high voltage complete with installed
connectors at the generator end. The user end is UN-terminated (cut end only).
Please contact us for more information