• 33 Ball Pond Road, Danbury, CT 06811-2828
  • 203-733-2110
BDS-HF 200-300-750 Active Front Panel RF Generators

Bdiscom is proud to introduce a new generation of low to medium power high frequency (HF) power generators designed to complement laboratory scale thin film R&D and industrial plasma systems.

BDS-HF Front View Front View                           BDS-HF Rear View Rear View

The BDS-HF-AFP Series of RF Generators includes an active front control/display panel and available in output power levels of 200, 300 and, 750 watts @13.56MHz.  The active front panel provides touch control and display of both the generator’s functions as well as an automatic impedance matching network module. It’s half rack size enables easy mounting in most plasma system applications.

bdiscom-rf-family-w-manitou-matrixx-switch     bdiscom-rf-family

The images above show the Model BDS-HF-AFP RF generator and the Model AMN-750 Automatic Matching Network. The optional control and RF cable set are also shown. The image to the right includes the Matrixx multi cathode switch module connected to the ANM-750.

The BDS-HF has the following features:

    • Compact size – the 1/2 rack enclosure measures 3RU (5.25″/132.5mm) tall.
    • LCD touch display – the large format blue on white contains all operating parameters.
    • Flexible control interface – RS232 and analog user ports are included – Profibus control is available as an option.
    • Efficient power conversion – A switch mode AC>DC converter and a class E RF power circuit enables 85>90% overall efficiency and low cabinet heat load.
    • Common exciter I/O
    • Compliance – CE MARK
    • Country of manufacture – ITALY

Product Specifications

  BDS-HF 200 BDS-HF 300 BDS-HF 750
AC mains input voltage 90>240VAC 1-phase 50/60Hz with Power Factor Correction 90>240VAC 1-phase 50/60Hz with Power Factor Correction 90>240VAC 1-phase 50/60Hz with Power Factor Correction
AC Mains input power   400 watts  
Grounding via PE (protective earth) via PE (protective earth) via PE (protective earth)
Enclosure 3RU 5.25″/132.5mm tall X 9.5″/241mm wide X 15-3/4″/400mm deep 3RU 5.25″/132.5mm tall X 9.5″/241mm wide X 15-3/4″/400mm deep 3RU 5.25″/132.5mm tall X 9.5″/241mm wide X 15-3/4″/400mm deep
Product weight 11lbs/5kg 11lbs/5kg 11lbs/5kg
Shipping weight X lbs/X kg X lbs/X kg X lbs/X kg
RF output power (into 50 ohms) 200 watts maximum 300 watts maximum 750 watts maximum
RF output frequency 13.56MHz crystal controlled 13.56MHz crystal controlled 13.56MHz crystal controlled
RF output power control   4>300 watts variable  
DC bias control      
RF output harmonics -40db below fundamental frequency -40db below fundamental frequency -40db below fundamental frequency
RF power detector Forward & reflected measurement with a 3% accuracy Forward & reflected measurement with a 3% accuracy Forward & reflected measurement with a 3% accuracy
RF output connection Type N female Type N female Type N female
User interface Monochrome blue on white touch display + rotary encoder Monochrome blue on white touch display + rotary encoder Monochrome blue on white touch display + rotary encoder
Cooling Forced air – through front panel with variable speed fans Forced air – through front panel with variable speed fans Forced air – through front panel with variable speed fans
Safety Interlock via a DB9 female connector located on the rear panel via a DB9 female connector located on the rear panel via a DB9 female connector located on the rear panel
Control interface Analog: 0>10VDC signals & Digital: RS232 (optional) Profibus Analog: 0>10VDC signals & Digital: RS232 (optional) Profibus Analog: 0>10VDC signals & Digital: RS232 (optional) Profibus
Operating (ambient) temperature 5>45 degrees C – no condensation or icing 5>45 degrees C – no condensation or icing 5>45 degrees C – no condensation or icing
RF circuit protection Reflected RF power, power amplifier (PA) over-voltage & over-current and over-temperature Reflected RF power, power amplifier (PA) over-voltage & over-current and over-temperature Reflected RF power, power amplifier (PA) over-voltage & over-current and over-temperature
Power conversion efficiency Typically 85>90% Typically 85>90% Typically 85>90%
Compliance CE  EMC EN55011 Group 2, Class A ISM CE  EMC EN55011 Group 2, Class A ISM CE  EMC EN55011 Group 2, Class A ISM
Matching network interface Direct connection to an AMN-750 automatic matching network via a DB15 female connector. Optional dual matching control. Direct connection to an AMN-750 automatic matching network via a DB15 female connector. Optional dual matching control. Direct connection to an AMN-750 automatic matching network via a DB15 female connector. Optional dual matching control.

CEX Common Exciter    Input = 0.25>1.5Vrms   Output = 1Vrms    Type SMA female connectors

Shipping

The Model BDS-HF (RF generator) and AMN (matching network) products are packaged for shipment in cardboard cartons with Ethafoam inserts. A single carton will contain either a generator or match unit and measures 23-5/8″ X 12″ X 12″ (60cm X 30cm X 30cm) with a weight of 22 lbs (10kg) each.

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