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Matrixx – Standard Models – up to 8 outputs

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Standard Matrixx Models – up to 8 outputs

The Matrixx Switch Module is a self contained module that typically includes high quality vacuum relays that are used to switch the output of RF power generators, DC sputtering power supplies or impedance matching networks between multiple loads. These products are built to order and the version delivered to you may be one of our “off the shelf” designs or a specifically designed model based on a specification developed during discussions with Manitou Systems engineers.

A Matrixx Switch Module may be sold as a “stand alone” box requiring the user to furnish the necessary 24VDC control power or it may include a complementary control panel, connection cable & AC>DC wall wart power supply. Optional coaxial cables & coaxial adapters may also be included based on your requirements and specification. Click here to go directly to the standard product list page.

CONNECTORS & LOCATIONS   The standard Matrixx enclosure will accommodate up to eight (8) connector positions on its front surface, input connector #1 on the bottom surface and, input connector #2 located on the right side surface. The control connector is a type D-Sub 15 male located on the left side.

00009015-matrixx-w-hn-conns      These images show typical connector locations         00009124-matrixx-w-hn-conn

Our typical (un-specified) connector location is: (click here – connector position document download)

  • Outputs on the front surface – across the top starting at the upper left
  • RF input on the bottom surface
  • DC input on the right side
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Three magnetron sputter cathodes connected to a Matrixx Switch Module

 

SWITCHING CONFIGURATIONS  Matrixx switch module configurations can be a simple single DC plasma power supply to two (2) magnetron cathodes or as complex as switching both RF and DC power sources between eight (8) cathodes. Just tell us what you’d like to do.

matrixx-3-plasma-dc

SPECIAL & OEM CONFIGURATIONS   Application specific designs include grounding of unused outputs and switching of multiple inputs to multiple outputs (transfer function). Send us your project specification for a quotation. 

The image to the right shows an OEM model designed with quick disconnect, high current sockets.

 

RF BLOCKING FILTER  When the Matrixx switch is used in applications where multiple matrixx-3-plasma-dc-filtermagnetron cathodes (in the same process chamber) are simultaneously powered by RF and DC power, the DC power supply feed needs to be protected from any RF energy conducted through the plasma discharge. Manitou offers an RF blocking filter option to enable stable operation. See our Eliminator Filter section for more information.

 

Switching Control Options  When the Matrixx switch is integrated into an OEM plasma processing system, it is typically controlled by the system’s PLC (computer) controller. A 24VDC control signal is simply connected to the Matrixx relay(s) and the specific relay(s) are energized to switch the desired power supply and /or output. A D-Sub 15 connector is provided for the connection.control-panelmatrixx-switch-module-control-panel-for-lit

When the Matrixx is added to an existing system or used in the R&D laboratory, we suggest purchasing the complementary remote control panel and power supply. This optional panel is mounted in the 19″ electronics rack and its cable plugged into the Matrixx switch module. The universal “wall wart” power supply is delivered with the proper AC mains plug for your country. A typical rotary switch control panel is shown above.

Power & Frequency Capability  All standard Matrixx switches are rated per the specific model/version. Working voltage and current may be limited by the type of connectors used as well as the type and model of the switching relay. Our engineers will be able to assist you in selecting the proper Matrixx model. Our designs may include parallel connected relays for higher currents as well as the use of silver plated copper conductors to enable lower power losses with RF power applications. Standard models typically use Teflon insulated, silver plated and, stranded wiring. Matrixx switches are designed for use with the following power sources:

  • DC plasma and glow discharge power supplies
  • Pulsing DC plasma power generators
  • HV DC power supplies
  • RF power generators (typically 13.56MHz)

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Physical Mounting   For RF plasma power applications where the Matrixx is switching a single RF system (matching network output) between multiple magnetron cathodes, the switch box is mounted close to or directly onto the impedance matching network. (See the image to the right.) The matching network / Matrixx assembly is then mounted onto the process system near the cathodes. Short length coaxial cables (typically 3’/1M long) are used to connect the Matrixx to each cathode.

For use with many DC plasma or pulsed DC plasma power applications, the Matrixx can be located either at the power supply end or at the plasma end. The coaxial cable length (power supply > plasma) does not have a length limit. Always refer to the process power supply manufacturer’s recommendations or contact Manitou Systems with details of your intended application.

Click here for the Matrixx standard product list page.

img_0178Manitou Systems offers a complete selection of coaxial cables and coaxial adapters to complement your installation.

Click here for our Powerline Coax Cable Page.

 

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