Manitou Systems offers these RF plasma power products including RF power generators, impedance matching networks and, and accessories.

(Click the link below to select your product category)

40KHz

• Model BDS-MF 5, 10 or, 15 kW mid frequency plasma generators  –  with graphical LCD front control panel

13.56MHz

• Model PB3 integrated system  –  100 & 300 watt RF generator + internal manual impedance matching network
• Model BDS-HF Blackbox 200, 300 or, 750 watt  RF generators  –  for OEM system integration
• Model BDS-HF AFP 200, 300 or, 750 watt RF generators  –  with graphical LCD front control panel

• Model MTK manually adjusted impedance matching network
• Model AMN 750 automatic impedance matching network  –  complements the Model BDS-HF generator products
• Model VIMM impedance matching network – inductively tuned topology

Accessories

• Impedance Matching Networks – Automatic & manually operated
• Matrixx^TM RF/DC switch modules
• Parallel cable module  –  for dual cable feed on sputtering sources
• Powerline^TM coaxial cables  –  standard and ultra-hi power power capability
• Eliminator^TM RF filters  –  for RF blocking applications

RF Power Delivery Packages

• Power Delivery Packages for Sputtering and Plasma Applications