• 33 Ball Pond Road, Danbury, CT 06811-2828
  • 203-733-2110
DC Plasma Power Supplies

model-pps10-image

The PPS10 Plasma Power Supply is a versatile, dual source power supply designed for R&D coating and cleaning applications. It can connect to and (individually) power up to two plasma loads which can be either/or small diameter magnetron sputter cathodes or glow discharge electrodes. 

Applications

  • Sputter deposition (PVD) – Physical vapor deposition of conductive thin film materials onto all types of substrate sizes and materials
  • Glow discharge processing – Plasma/Ion based cleaning of substrates and critical parts such as TEM grids using air as the process gas 
  • Etching of hydrocarbons and biological materials

Features

The PPS10 includes provisions to connect an external vacuum system (pressure) interlock and can be mounted in a 19″ electronics rack or used in a  stand-alone configuration. It’s enclosure occupies 3.5″ (2RU) in height.

Operator control and metering is available via the front panel and remote control via Serial (RS232 or Ethernet).

A resonant switch mode high voltage circuit provides efficient power conversion as well as precise output power control. Ultra fast control loop response time (<95ns) ensures smooth process arc detection and suppression. The linear control circuits enable stable output at power levels as low as 2 watts.

The output power may be controlled by selecting voltage, current or, power regulation modes. An internal timer mode offers built in process cycle control. A front panel mounted LED bar graph displays % of output power. The OLED graphical display shows the user all critical parameters. Operator inputs are handled with a rotary encoder and tactile switches.     

Specifications  

  • AC Mains Voltage: 90>132VAC, 50>60Hz, single phase -or- 180>265VAC, 50>60Hz, single phase 
  • AC Mains Current: 6.3A @ 120VAC -or- 3.15A @230VAC @ 500 watts output
  • AC Mains Power Factor: >0.95
  • Output Power: 500 watts
  • Output Voltage / Current: 0>1000VDC, negative polarity, 1 volt control steps -or- 0>1000mA, 1 mA steps  
  • Output Regulation: Power, current or, voltage
  • Output Arc Management: <2 us response time
  • Output Ripple: 2% p-p (50KHz)
  • Output Ramp: User selectable
  • Remote Communications: Ethernet (100Mb) and RS232 or RS485
  • Local Control: Via the front panel controls
  • Dimensions: 19″ (483mm) wide X 10.63″ (270mm) deep X 3.5″ (87mm) high (2RU)
  • Unit Weight: 8.2 lbs (3.7kg)
  • Cooling: Forced air 32>86 degrees F / 0>30 degrees C
  • Humidity: 15>75% relative humidity, non-condensing or icing
  • Ambient Operating Temperature: 41>104 degrees F / 5>40 degrees C
  • Compliance: CE marked  

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