• 33 Ball Pond Road, Danbury, CT 06811-2828
  • 203-733-2110
BDS-GLOW 3000/6000 Glow Discharge Generators

Parallel-plate-plasma-discharge

222_bds_glow_2015_front_pannel

BDS GLOW 3000/6000 AFP Generator

The BDS-Glow AFP is a high voltage DC generator with AFP (Active Front Panel) touch screen designed for glow discharge processes.

Used to power R/D and industrial plasma processes, it exhibits high power conversion efficiency (90%) as well as an extremely stable operation.

Typical applications include plasma cleaning or etching of a substrate prior to a thin film coating.

An optional process gas feedback enables  control of up to two mass flow controllers (MFC). Using this option, the selected glow discharge process will be stabilized using a variable gas flow to regulate the generator’s output set-point.

Product Specifications

  • AC mains input voltage:  480V or 400V 3-phase 50/60Hz +/-10% (USA or European AC mains voltage specified at time of order)

AC Mains input current: 3kW 480V/xA or 400V/xA     6kW 480V/xA or 400V/xA (maximum / phase)

  • Grounding: via PE (protective earth terminal)
  • Enclosure: 19″ wide – 4RU (7″/178mm) high 19.5″/490mm deep
  • Unit weight: xlbs/xkg
  • Output: DC 
  • Output polarity: Negative (referenced to ground)
  • Maximum output power: 3.2 and 6.4 kW models
  • Maximum output voltage: 4kV DC
  • Maximum output current:
    • 3.2kW Model 0.8 amps
    • 6.4kW Model 1.6 amps
  • Output connection: one Fischer type 105 coaxial connector – for use with type RG214/U cable
  • Output cables:  weight per cable assembly is x lbs.
  • Arc detection: transformer primary over current sensing with a 1uS response time
  • Cooling: Forced air – through front panel with variable speed fans
  • Front panel display: Touch screen LCD  – 240 x 128 pixel – blue color
  • Front panel user controls: LCD touch display + rotary encoder
  • Measured and displayed parameters: DC output voltage / output current
  • Output regulation mode: Voltage or Current (front panel selected)
  • Functional protection: Over current – open load – process arcs – AC mains under voltage – over temperature
  • Control interface:
    • Digital: (optional) RS232 or Profibus
    • Analog: via a DB25 connector – 0>10VDC signals, 24VDC digital & interlock
      • Output current: 10V = xA
      • Output voltage: 10V = 4000V
  • Operating (ambient) temperature: 5>40 degrees C
  • Power conversion efficiency: Typically 90%
  • Compliance: CE / EMC EN55011 Group 2, Class A ISM
  • Country of manufacture – ITALY
  • Shipping weight: 66 lbs. (30kg) The total shipping weight is based on the model and included accessories.
  • Packaging: Wooden crate measuring 36″ (90cm) X 24″ (60cm) X 36″H (90cm)
  • Shipping methods: This product may be shipped from the factory (as an individual crate).

Available Models

  • BDS-Glow 3000 AFP 3.2kW 400V/3ph AC Mains input            Order PN: 00010454
  • BDS-Glow 3000 AFP 3.2kW 480V/3ph AC Mains input            Order PN: 00010455
  • BDS-Glow 6000 AFP 6.4kW 400V/3ph AC Mains input            Order PN: 00010456
  • BDS-Glow 6000 AFP 6.4kW 480V/3ph AC Mains input            Order PN: 00010457

Options

Please contact us for more information 

  • Process gas control feedback; 1 or 2 MFC control
  • Non-standard output voltage level

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